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LAM Flex Parts

電洽

2nd NEW

857-073299-001 SEAL CHOKE RING CORE

713-069935-003 KAPTON SHIM ON TCP

713-072792-003 KAPTON SHIM ON ELECTRODE

857-072806-005 (A)SHIELD GASKET ROUND TEFLON 450A

857-073710-002 A)CIRLEX GASKET SET

857-065064-005 ABE INNER

857-027108-001 FLEX, CHOKE RING

714-072727-048 JACKET RING, HEATSINK, HE COUPLING , RING300 Rev#1

714-072728-003 HEAT INSULATOR RING, HEATSINK, ESC/COUPLIN

713-073439-010 HEAT INSULATOR

714-072728-117 RING, ESC/CPLNG,298,SP

714-072728-130

857-085550-822 Sheet Flex FS Electrode Backside

857-073299-002 KIT, GASKET, TOP, ELTCD

839-070842-004 ALL STUD SOCKET

839-086924-052 Process Kit Etcher Parts Flex FX C-Section Ring Socket

839-086924-050 Stud Socket Inner Flex FX

839-086924-051 Socket Flex FX Outer Cell

839-086924-052 Process Kit Etcher Parts Flex FX C-Section Ring Socket

713-067673-002 PIN, ALIGN.UPR, ELCTD, 300MM

713-083166-001 SLV, ALGIN, INNER ELCTD

713-083166-002 SLV, ALGIN, INNER ELCTD

STEPPED

713-082885-002 SPACER TEFLON STG GAS INJECTOR

716-082886-006 PROCESS KIIT UPPERCHAMBER KIYO

857-080373-010 SCREW KIT, SCR, TORX, NRDLK,6-32

719-078253-060 D RING, GASKET, GEL, CER, 509

719-078253-103(wide)